UHP diaphragm pressure regulators valves operate across a spectrum of configurations and specialized versions engineered specifically for deployment within cleanroom environments as well as broader utility and equipment manufacturing sectors where process gas management demands precision control.
UHP diaphragm pressure regulators valves are available in various configurations and versions for usage in (cleanroom) utility and equipment manufacturing. The SS316L(VAR) pressure regulators have a polished internal surface finish, to minimize the forming of particles.
They are assembled and tested in a cleanroom environment.The valves are available with manual actuation for high and low pressures. The pressure regulators can be provided in 2/3/4/5 or 6 port configurations with the associated 1/4" face seal connections.

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+86 (10) 56863306