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技术领先

Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395420

Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395420

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描述

MicroTorr purifiers represent a comprehensive approach to point-of-use (POU) gas purification systems, addressing the critical requirements that semiconductor fabrication, analytical instrumentation, and specialty gas distribution applications demand.

一般信息

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

Applicaties

Weld gas/purge gas

Pharmaceutical production

Semiconductor process equipment

Analytical equipment

Annealing cover gas

LED manufacturing

Flat panel display production

Solar and energy

Other emerging technologies

Downloads

Point of use purifiers datasheet2022年9月9日, 09:57 / 508.31 kB

Point of use purifiers brochure2022年9月9日, 09:57 / 1.43 MB

技術規格

Article

31395420

Header [Brand]

Purifier UHP

Description

Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 4,5 SLPM

Packaging specification

Cleaned and double-packed

Manufacturer

Mott

Manufacturer code

050F-V04-FLUOR-CR-TA

Vessel construction (material)

SS 316L

Gas(es) purified

C2F₆
C₃F₈
C₄F₈
CClF₃
CCl₂F₂
CCl₄
CF₄
CHClF₂
CHF₃
CH₃F

Impurities removed

CO
CO₂
H₂
H₂0
NMHC
O₂

Particle filtration

0,0015 μm

Inlet particle filtration

1 µm

Outlet purity

< 100 PPT

Regenerable

Maximum Pressure Drop

<2 psid

Max. operating pressure

17,24 Bar

Leak rating

10^-9 mbar · l/s

Max. temperature

Max. 50 °C

Maximum Flow

4,5 SLPM

Average Flow

0,3 SLPM

Polishing

Electropolishing

Surface finish

<10 µm Ra

增值税常規税率

21%

尺寸

Face Seal male 1/4

Ø D

25,4 mm

84,0 mm

備注

Remarks

Optional: 0.003 µm filtration
inlet/outlet fittings and valves
Sub-micron particle filtration
Face-to-face matching

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Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395420

Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 4,5 SLPM

物料號 31395420